Jumril Yunas, Nur Indah, Hisyamudin M. Hanifah, Ida Hamidah, Doni F. Ramadhan, Iin Mustagisin, Badariah Bais, Azrul A. Hamzah
In this paper, we report the study of the mechanical properties of the vibration sensor membrane implemented for energy harvester application. The study is done using Finite Element Method (FEM) analysis. The structure and geometry of the membrane with a planar spring arm design are the parameters of the analysis in this study. Some common MEMS materials, such as silicon, polyimide and PDMS (Polydimethylsiloxane) are also chosen for analysis. While the mechanical property of the membrane is analysed in terms of the resonance frequency, deflection height, surface deformation and the von-Mises-stress. The results show that the deflection height is proportional to the membrane material, thickness and applied pre-stress. It is shown that the thinner the membrane or the higher the pre-stress level is applied to the membrane the higher the membrane can be deflected. The PDMS is a promising material to be used as the flexible membrane material, as it has the highest deformation capability among other materials. It can be seen also that the higher elastic modulus of the material the higher membrane arm deflection could be achieved. These analyses will provide an insight into the mechanical property of a flexible membrane as the movable part of the electromagnetic energy harvester system. © School of Engineering, Taylor's University
Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, UKM Bangi, Selangor DE, 43600, Malaysia; Universitas Mercu Buana, Jalan Meruya Selatan, Jakarta, 11650, Indonesia; Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, UKM Bangi, Selangor, 43000, Malaysia; Universitas Pendidikan Indonesia, Jl. Dr. Setiabudhi No. 229, Bandung, 40154, Indonesia
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